To provide a displacement sensor capable of measuring a measurement object without applying an excessive thrust force thereto, preventing malfunctioning and deterioration, and measuring in any desired direction.
The displacement sensor 50 has a stylus 2 attached to a lower end of a sensor shaft 1 and a displacement detection target material 3 attached to an upper end thereof. The sensor shaft 1 is supported by radial bearings 4 and disallowed to move in a radial direction and allowed to move in an axial direction. Static pressure gas bearings are applied as the radial bearings 4. By feeding the compressed air from a nozzle into gaps between the static pressure gas bearings and the sensor shaft 1, the static pressure gas bearings can support the sensor shaft 1 in the radial direction without bringing the sensor shaft 1 into contact with the static pressure gas bearings.
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Hisato Noda
Masayuki Sakai
Nobuo Arakawa