Title:
DISPLACEMENT TYPE LIQUID FEEDING APPARATUS
Document Type and Number:
Japanese Patent JP3844418
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To feed liquid of a constant amount with high accuracy and reproducibility, to shorten the time required for stabilizing the liquid, and to control flow rate immediately after starting of the liquid feeding, by adopting a displacement type pump using a deformable diaphragm.
SOLUTION: A displacement type liquid feeding apparatus comprises the displacement type pump 10 and a differential pressure control part 42. The displacement type pump 10 has: a liquid feeding chamber 28 having a liquid-tight container 22 of which part is formed of the deformable diaphragm 24; and a diaphragm driving device 36 connected with the diaphragm 24 and deforming the diaphragm 24 to discharge liquid from the liquid feeding chamber 28. The differential pressure control part 42 controls constant differential pressure between the inside of the diaphragm 24 and the outside of the diaphragm 24, at the time of the liquid feeding.
Inventors:
Kuniaki Horie
Tsukamoto Satoshi
Kenji Kamoda
Hiroshi Yamagishi
Uemura Shinya
Tsukamoto Satoshi
Kenji Kamoda
Hiroshi Yamagishi
Uemura Shinya
Application Number:
JP2000217926A
Publication Date:
November 15, 2006
Filing Date:
July 18, 2000
Export Citation:
Assignee:
Ebara Corporation
International Classes:
F04B43/08; F04B49/00; F04B49/08; H01L21/31; H01L21/316; (IPC1-7): F04B43/08; F04B49/00; F04B49/08; H01L21/31; H01L21/316
Domestic Patent References:
| JP10238470A | ||||
| JP49096301A | ||||
| JP11200051A | ||||
| JP64021201A | ||||
| JP5253402A |
Attorney, Agent or Firm:
Isamu Watanabe
Shintaro Hotta
Shintaro Hotta