Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
DISPLAY DEVICE AND ITS MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP2008124266
Kind Code:
A
Abstract:

To provide a display device in which an MIS transistor whose semiconductor layer is an amorphous semiconductor and an MIS transistor whose semiconductor layer is a polycrystalline semiconductor are formed, wherein crystallinity of the semiconductor layer comprising the polycrystalline semiconductor is improved when each of MIS transistors is structured as a bottom gate.

The display device includes a first MIS transistor formed on a first region of a substrate and a second MIS transistor formed on a second region different from the first region, each of which has a gate electrode between the substrate and semiconductor layer. The first MIS transistor has a semiconductor layer comprising an amorphous semiconductor, while the second MIS transistor has a semiconductor layer comprising a polycrystalline semiconductor. The gate electrode on the second MIS transistor is smaller in thickness than that on the first MIS transistor.


Inventors:
NODA TAKASHI
KAMO NAOHIRO
NIIMOTO HIDEAKI
Application Number:
JP2006306853A
Publication Date:
May 29, 2008
Filing Date:
November 13, 2006
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
HITACHI DISPLAYS LTD
International Classes:
H01L29/786; G02F1/1345; G02F1/1368; H01L21/20; H01L21/336; H01L21/8234; H01L27/08; H01L27/088
Attorney, Agent or Firm:
Akita Haruki