Title:
DISPLAY DEVICE
Document Type and Number:
Japanese Patent JP2014139676
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To form a pixel electrode and a metal film, using one resist mask when manufacturing laminated structure by forming the metal film on the pixel electrode.SOLUTION: A conductive film and a metal film that serves as a pixel electrode are laminated. A resist pattern, having a thick film region and a region with film thickness smaller than that of the thick film region, is formed on the metal film, by using an exposure mask having a semipermeable section. The pixel electrode and the metal film, in contact with a portion of the pixel electrode, are formed by using the resist pattern. As a result, the pixel electrode and the metal film are formed by using one resist mask.
Inventors:
KIMURA HAJIME
Application Number:
JP2014031714A
Publication Date:
July 31, 2014
Filing Date:
February 21, 2014
Export Citation:
Assignee:
SEMICONDUCTOR ENERGY LAB
International Classes:
G09F9/30; G02F1/1368; H01L51/50; H05B33/22; H05B33/26; H05B44/00
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