Title:
Display device
Document Type and Number:
Japanese Patent JP5982550
Kind Code:
B2
Abstract:
A manufacture process of a thin film transistor mounted on an EL display device is simplified. A thin film transistor is manufactured by stacking a first conductive film, an insulating film, a semiconductor film, an impurity semiconductor film, and a second conductive film; forming a first resist mask over the stacked films; performing first etching to form a thin-film stack body; performing second etching by side etching is conducted on the thin-film stack body to form a gate electrode layer; and forming a source and drain electrode layer and the like with use of a second resist mask. An EL display device is manufactured using the thin film transistor.
More Like This:
| WO/2020/054285 | POLARIZING PLATE WITH FRONT PLATE |
| WO/2016/186332 | DISPLAY DEVICE |
| JP6568180 | Organic light emission display device |
Inventors:
Hidekazu Miyairi
Shigeki Komori
Toshiyuki Isa
Atsushi Umezaki
Shigeki Komori
Toshiyuki Isa
Atsushi Umezaki
Application Number:
JP2015200980A
Publication Date:
August 31, 2016
Filing Date:
October 09, 2015
Export Citation:
Assignee:
Semiconductor Energy Laboratory Co., Ltd.
International Classes:
H01L27/32; G09F9/30; H01L29/786; H01L51/50; H05B33/14; H05B44/00
Domestic Patent References:
| JP2001202035A | ||||
| JP2003179069A | ||||
| JP2001109405A | ||||
| JP2003223119A | ||||
| JP2001174844A | ||||
| JP2008009372A | ||||
| JP9160076A | ||||
| JP11133455A | ||||
| JP9033951A | ||||
| JP2001188240A | ||||
| JP64084669A | ||||
| JP2009276758A | ||||
| JP2009158941A | ||||
| JP2009231828A |
Foreign References:
| US20050219433 |
Previous Patent: A pretreatment method and a pretreatment system of the lignocellulose system biomass
Next Patent: JPS5982551
Next Patent: JPS5982551