Title:
マスクアライメント法を用いたディスプレイの製造方法
Document Type and Number:
Japanese Patent JP4534011
Kind Code:
B2
Abstract:
A method of producing a display comprises the steps of: aligning a display substrate having a plurality of pixel patterns and a mask having a plurality of holes corresponding to the pixel patterns to measure the position between the holes of the mask and the pixel patterns of the display substrate before fixing the position between the mask and the substrate; fixing the position between the mask and the substrate and measuring the position between the holes and the pixel patterns in this situation to calculate shift levels of the position between the position measured in this step and the position measured in the first step; and adjusting the position between the mask and a second display substrate by feeding back the shift levels of the position calculated in the second step when aligning the mask and the second display substrate.
Inventors:
Jun Tanaka
Koji Murayama
Koji Murayama
Application Number:
JP2004187973A
Publication Date:
September 01, 2010
Filing Date:
June 25, 2004
Export Citation:
Assignee:
Kyocera Corporation
Chi Mei Optoelectronics Corporation
Chi Mei Optoelectronics Corporation
International Classes:
H05B33/10; C23C14/04; C23C14/12; C23C14/24; G09F9/30; H01J9/00; H01L27/32; H01L51/00; H01L51/50; H01L51/56
Domestic Patent References:
| JP2004158268A | ||||
| JP2000192224A | ||||
| JP2002009098A | ||||
| JP2000260690A | ||||
| JP2002023697A |
Attorney, Agent or Firm:
Takayoshi Kusumoto
Ken Masuda
Takanobu Nakaetsu
Ken Masuda
Takanobu Nakaetsu