DISTANCE MEASURING METHOD AND DEVICE

Japanese Patent JP3272436

B2

PURPOSE: To provide a distance-measuring method and device which can measure distance accurately even if there is a traveling displacement such as fine vibration on a surface to be measured.
CONSTITUTION: The measuring device is provided with a light source part 1 for simultaneously applying coherent beams whose reference oscillation wavelengths differ each other to a surface M3 to be measured, a measurement optical system 3 which has a reference surface M4 and causes the reflection light from the reference surface M4 to interfere with the reflected light from the surface M3 to be measured for each reference oscillation wavelength, and light receivers PD3 and PD4 which are provided at the measurement optical system 3 corresponding to each reference oscillation wavelength and performs photoelectric conversion of the intensity of interference fringes obtained by allowing; the reflected light from the surface M3 to be measured to interfere with the reference reflected light from the reference surface M4 corresponding to it. Then, the distance to the surface M3 to be measured is calculated by measuring the light path difference from the reference surface M4 to the surface M3 to be measured based on the amount of phase change of a signal corresponding to the interference fringes obtained by the light receivers PD3 and PD4 for each reference oscillation wavelength when each reference oscillation wavelength is simultaneously changed within a fine range.

Akihiko Sekine

JP235393A

April 08, 2002

January 11, 1993

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Topcon Co., Ltd.

G01S17/36; G01B9/02; G01B11/00; G02B9/02; (IPC1-7): G01B11/00; G01S17/36; G02B9/02

JP2122292A
JP438404A
JP60306A

Tamio Nishiwaki

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