Title:
分割された電極集合体並びにプラズマ処理方法。
Document Type and Number:
Japanese Patent JP5165825
Kind Code:
B2
Abstract:
An electrode assembly ( 50 ) and an associated plasma reactor system ( 10 ) and related methods for a variety of plasma processing applications. The electrode assembly provides control of a plasma density profile ( 202 ) within an interior region ( 30 ) of a plasma reactor chamber ( 20 ). The electrode assembly includes an upper electrode ( 54 ) having a lower surface ( 54 L), an upper surface ( 54 U) and an outer edge ( 54 E). The lower surface of the upper electrode faces interior region of the plasma chamber housing the plasma ( 200 ), and thus interfaces with the plasma. The electrode assembly further includes a segmented electrode ( 60 ) arranged proximate to and preferably substantially parallel with the upper surface of the upper electrode. The segmented electrode comprises two or more separated electrode segments ( 62 a , 62 b , . . . 62 n), each having an upper and lower surface. Each electrode segment is spaced apart from the upper electrode upper surface by a corresponding controlled gap (Ga, Gb, . . . Gn). The electrode assembly may further include one or more actuators ( 110 ) attached to one or more electrode segments at the upper surface of the one or more electrode segments. The actuators allow for movement of the one or more electrode segments to adjust one or more of the controlled gaps. The adjustable controlled gaps allow for controlling the shape of the plasma density profile within the interior region of the chamber, thereby allowing for a desired plasma process result.
Inventors:
Mitrovic, Andrey S
Johnson, Wayne El
Johnson, Wayne El
Application Number:
JP2001552425A
Publication Date:
March 21, 2013
Filing Date:
January 03, 2001
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
C23C16/44; H01J37/32; H01L21/205; H01L21/3065
Domestic Patent References:
| JP1032171A | ||||
| JP6333697A | ||||
| JP8306499A | ||||
| JP5306478A | ||||
| JP11162696A | ||||
| JP1233730A | ||||
| JP2215122A | ||||
| JP574741A | ||||
| JP10125495A | ||||
| JP6475690A |
Attorney, Agent or Firm:
Kurata Masatoshi
Satoshi Kono
Makoto Nakamura
Yoshihiro Fukuhara
Takashi Mine
Toshio Shirane
Sadao Muramatsu
Nobuhisa Nogawa
Kocho Chojiro
Naoki Kono
Katsu Sunagawa
Tatsushi Sato
Takashi Okada
Mihoko Horiuchi
Takenori Masanori
Satoshi Kono
Makoto Nakamura
Yoshihiro Fukuhara
Takashi Mine
Toshio Shirane
Sadao Muramatsu
Nobuhisa Nogawa
Kocho Chojiro
Naoki Kono
Katsu Sunagawa
Tatsushi Sato
Takashi Okada
Mihoko Horiuchi
Takenori Masanori