Title:
遠隔プラズマ酸化チャンバ用ドッグボーン入口錐体輪郭
Document Type and Number:
Japanese Patent JP7387794
Kind Code:
B2
Abstract:
Embodiments of the present disclosure generally relate to a processing chamber for conformal oxidation of high aspect ratio structures. The processing chamber includes a chamber body with a first side and a second side opposite the first side, and a flow assembly disposed in the first side. The flow assembly includes a flow divider to direct fluid flow away from a center of a substrate disposed in a processing region of the processing chamber. The flow divider includes a crescent shaped first side, a top, and a bottom. The processing chamber also includes a distributed pumping structure located adjacent to the second side. The flow assembly is designed to reduce flow constriction of the radicals, leading to increased radical concentration and flux.
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Inventors:
Pawn Day, Biswas Kumar
Shah, Cartique
Olsen, Christopher S.
Chandra, Agus Sophian
Low, Hansel
Shono, Eric Kihara
Raju, Hemanta
Shah, Cartique
Olsen, Christopher S.
Chandra, Agus Sophian
Low, Hansel
Shono, Eric Kihara
Raju, Hemanta
Application Number:
JP2022051030A
Publication Date:
November 28, 2023
Filing Date:
March 28, 2022
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
H01L21/31; H01L21/316
Domestic Patent References:
| JP2001118799A | ||||
| JP8055842A | ||||
| JP5291151A | ||||
| JP8309233A | ||||
| JP2014527300A |
Foreign References:
| US20130040444 |
Attorney, Agent or Firm:
Sonoda & Kobayashi Patent Attorneys Corporation