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Title:
DOOR OPENER/CLOSER FOR CHAMBER OF SEMICONDUCTOR MANUFACTURING EQUIPMENT
Document Type and Number:
Japanese Patent JPH0555101
Kind Code:
A
Abstract:

PURPOSE: To provide a simply constituted door opener/closer for a chamber of semiconductor manufacturing equipment, which enables opening/closing a door with both hands holding wafer cassettes.

CONSTITUTION: A chamber for semiconductor manufacturing equipment is provided in the front face of a housing constituting the chamber with a door 2 which slides up/down to open/close. A door actuator 4a interlocking with the door 2, is projected from the housing and equipped below the door 2.


Inventors:
KOIZUMI HIROYUKI
Application Number:
JP23691291A
Publication Date:
March 05, 1993
Filing Date:
August 26, 1991
Export Citation:
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Assignee:
CANON KK
International Classes:
F26B25/12; H01L21/02; (IPC1-7): F26B25/12; H01L21/02
Attorney, Agent or Firm:
Tetsuya Ito (1 outside)