PURPOSE: To prevent the leakage by a differential pressure between both chambers and to reduce a sliding surface at valve opening/closing time so as to suppress generation of dusty grains by providing a valve in respective chamber sides, in a device or the like formed of many film forming chambers.
CONSTITUTION: The first and second bodies 1, 2 are mounted opposed to each other and the first and second valves 3, 4 for opening/closing openings 1a, 2a are provided in the first and second film forming chambers 11, 12. The first and second arms 7, 8 are pivotally supported by the first and second shafts 5, 6 rotatably to the first and second bodies 1, 2, and the first and second valves 3, 4 are mounted by the first and second pivotally supporting shafts 9, 10 on a point end part of the arms 7, 8. The first body 1 is guided relating to the second body 2 by inserting a guide post 18 to a guide bush 17. In this way, a sliding surface can be sharply reduced, and the leakage can be suppressed while substantially suppressing generation of dusty grains.
| JP5358784 | Rotary valve device |
| JPH09196205 | 3-PORT VALVE |
| WO/2001/003162 | LOW-PRESSURE APPARATUS AND PRESSURE CONTROL VALVE |
SUZUKI MASAYUKI
AOKI DAIYA
MURAMATSU FUMIO
| JPH0292179U | 1990-07-23 |