Title:
DOUBLE-SIDE POLISHING DEVICE
Document Type and Number:
Japanese Patent JP2012020358
Kind Code:
A
Abstract:
To provide a polishing device of structure capable of polishing by pressurizing an upper surface plate, while securing the following performance of the upper surface plate, in regard to a planetary gear type polishing device.
In addition to the conventional suspension structure using a wire 9 for suspending the upper surface plate 5, a load transmitting portion for evenly transmitting a load, which works downward from an upper surface plate suspension plate 2, to the upper surface plate 5 through an upper surface plate connecting ring 13 is structured by disposing a pressurizing wire 12 for giving a pressure load to the upper surface plate 5 on the inner peripheral side. Polishing under pressure load conditions is thereby enabled.
Inventors:
SATO TAMATARO
Application Number:
JP2010158840A
Publication Date:
February 02, 2012
Filing Date:
July 13, 2010
Export Citation:
Assignee:
HAMAI SANGYO
International Classes:
B24B37/08
Attorney, Agent or Firm:
Yuichi Morita
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