Title:
DOUBLE-SIDED ADHESIVE SHEET, POLISHING MEMBER, AND SURFACE PLATE WITH POLISHING PAD
Document Type and Number:
Japanese Patent JP2022096727
Kind Code:
A
Abstract:
To provide a double-sided adhesive sheet for polishing, which can develop strong adhesive force from room temperature to high temperature range, and can develop sufficient holding power for a long time in high temperature range, has excellent temporal stability, can develop and maintain adhesive strength and holding power comparable to those before storage even when the double-sided adhesive sheet before attachment is stored for a long time in a high temperature environment or a high temperature and high humidity environment.SOLUTION: In a double-sided adhesive sheet for forming a polishing member, or for attaching a polishing member or a polishing a pad, which includes a sheet-like substrate and adhesive layers on both sides of the sheet-like substrate, an adhesive layer 1 on at least one surface is an adhesive layer with a gel content of 5 to 50 mass% formed from an acrylic copolymer (A1) having a specific composition and a specific molecular weight, a pressure-imparting resin (B1) having a specific amount, and a tolylene diisocyanate trimetylol propane adduct.SELECTED DRAWING: None
Inventors:
ABE TADASHI
Application Number:
JP2020209851A
Publication Date:
June 30, 2022
Filing Date:
December 18, 2020
Export Citation:
Assignee:
TOYO INK SC HOLDINGS CO LTD
International Classes:
H01L21/304; B24B37/12; B24B37/22; C09J7/38; C09J11/08; C09J133/02; C09J133/06; C09J133/14; C09J175/04; C09J193/00; C09J193/04
Domestic Patent References:
JP2017105976A | 2017-06-15 | |||
JP2015078348A | 2015-04-23 | |||
JP2017008158A | 2017-01-12 | |||
JP2017057295A | 2017-03-23 | |||
JP2010221366A | 2010-10-07 | |||
JP2008255253A | 2008-10-23 | |||
JP2014019801A | 2014-02-03 | |||
JP2015038174A | 2015-02-26 | |||
JP2017105931A | 2017-06-15 | |||
JP2020002372A | 2020-01-09 | |||
JP2016183211A | 2016-10-20 |
Foreign References:
US20100104864A1 | 2010-04-29 |
Attorney, Agent or Firm:
Ken Ieiri
Keiko Hata
Keiko Hata
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