DOWNSTREAM TYPE ASHING DEVICE

Title:

DOWNSTREAM TYPE ASHING DEVICE

Document Type and Number:

Japanese Patent JPH02183523

Kind Code:

A

Abstract:

PURPOSE: To enable a resist film adhered to the rear surface of a substrate due to intrusion of a radical within plasma of a reaction gas between this gas to be ashing-eliminated by providing a plurality of pins for forming a gap in reference to a heating means by supporting the rear surface of a substrate within a vacuum treating room.

CONSTITUTION: A heating means 5 is constituted by a plurality of infrared lamps and a plurality of pins 12 protruding toward the upper part through the heating means 5 is provided within a vacuum treating room 4. The rear surface of a substrate 1 is supported by the tip of the pin 12 so that a gap between the substrate 1 and the heating means 15 can be formed. Thus, a reaction gas radical enters the gap, thus ashing the resist film on the rear surface.

Inventors:

KIKUCHI MASASHI
TAKADA TOSHINARI
WATABE TOKUO

Application Number:

JP204289A

Publication Date:

July 18, 1990

Filing Date:

January 10, 1989

Export Citation:

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Assignee:

ULVAC CORP

International Classes:

C23F4/00; H01L21/302; H01L21/3065; (IPC1-7): C23F4/00; H01L21/302

Domestic Patent References:

JPS63136630A	1988-06-08
JPS5770278A	1982-04-30
JP62163937B

Attorney, Agent or Firm:

Kinichi Kitamura (3 others)

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