Title:
描画装置および描画方法
Document Type and Number:
Japanese Patent JP7257760
Kind Code:
B2
Abstract:
The present invention relates to a technique for reducing a device area of a drawing device. The drawing device according to the embodiment comprises: a drawing part; and a maintenance part, wherein the drawing part discharges a functional liquid to a work piece moving along the conveying direction to perform drawing on the work piece, and the maintenance part maintains a head of the drawing part in a state where the drawing part moves downward along the conveying direction.
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Inventors:
Kazuhito Miyazaki
Yoshiharu Ota
Yoshiharu Ota
Application Number:
JP2018170426A
Publication Date:
April 14, 2023
Filing Date:
September 12, 2018
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
B05C11/10; B05C5/00; B05D1/26; B41J2/01; B41J2/165
Domestic Patent References:
| JP2016077966A | ||||
| JP2010198028A | ||||
| JP2015188877A | ||||
| JP2008155113A | ||||
| JP2011075789A | ||||
| JP2004014393A | ||||
| JP2010164776A | ||||
| JP2009274068A | ||||
| JP2007307915A |
Foreign References:
| US20080024532 | ||||
| US20180065293 | ||||
| US20160288508 |
Attorney, Agent or Firm:
Sakai International Patent Office
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