Title:
描画装置、および、物品の製造方法
Document Type and Number:
Japanese Patent JP5709465
Kind Code:
B2
Abstract:
A drawing apparatus, that performs drawing on a substrate using an array of charged particle beams, includes a projection system and a controller. The projection system is configured such that the array includes a plurality of sub arrays arranged discretely on the substrate with a space between the sub arrays in a predetermined direction, and a first width of the space in the predetermined direction is n1/n2 times (each of n1 and n2 is a positive integer) a second width of the sub array in the predetermined direction. The controller is configured to control the projection system and a driving mechanism such that drawing is performed in order with the plurality of sub arrays for [n1+n2] sets of drawing regions that are shifted from one another by as much as [1/n2] times the first width so that drawing is performed for a shot region on the substrate.
Inventors:
Tomoyuki Morita
Application Number:
JP2010244366A
Publication Date:
April 30, 2015
Filing Date:
October 29, 2010
Export Citation:
Assignee:
Canon Inc
International Classes:
H01L21/027
Domestic Patent References:
| JP10032188A | ||||
| JP3647128B2 | ||||
| JP3008321A | ||||
| JP11307445A |
Attorney, Agent or Firm:
Takuma Abe
Sogo Kuroiwa
Sogo Kuroiwa