Title:
DRAWING DEVICE AND DRAWING METHOD
Document Type and Number:
Japanese Patent JP2014197136
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a technology improving drawing accuracy of a pattern.SOLUTION: A drawing device 100 draws a pattern on a substrate 90 by irradiating light to the substrate 90 formed photoreceptor. The drawing device 100 comprises: multiple plotting heads 33 emitting drawing light to draw pattern to the substrate 90; a horizontal scanning system 231 scanning the substrate 90 by the drawing light by making the multiple plotting heads 33 relatively for the substrate 90; and a drawing control unit 513 making each plotting heads 33 draw the pattern while adding a position shift amount Δy of temperature dependency of a drawing position of each plotting heads 33 for the substrate 90 on the basis of temperature information of cross-linked structure 43 detected by a thermal sensing device 81.
Inventors:
SHIROTA HIROYUKI
SAKURAI SATOSHI
SAKURAI SATOSHI
Application Number:
JP2013072950A
Publication Date:
October 16, 2014
Filing Date:
March 29, 2013
Export Citation:
Assignee:
DAINIPPON SCREEN MFG
International Classes:
G03F9/00; G03F7/20; H01L21/027
Domestic Patent References:
| JP2005189403A | 2005-07-14 | |||
| JP2009104004A | 2009-05-14 | |||
| JP2006330166A | 2006-12-07 | |||
| JP2010525406A | 2010-07-22 | |||
| JP2006337878A | 2006-12-14 |
Attorney, Agent or Firm:
Hidetoshi Yoshitake
Takahiro Arita
Takahiro Arita
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