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Title:
DRAWING-UP ROOM
Document Type and Number:
Japanese Patent JP2002138620
Kind Code:
A
Abstract:

To provide a drawing-up room in which dusting works, such as overhaul and cleaning of a furnace body and components in the furnace body and works or the like requiring high clean environment, such as the stock of a raw material into the furnace body as drawing-up machine startup preparation can be separated while the safety of works can be ensured even when the drawing-up machines are enlarged in the drawing-up room, in which a plurality of the single-crystal drawing-up machines are installed.

In the cleaned drawing-up room, in which the plurality of the single-crystal drawing-up machines are mounted, which has a plurality of working floors and in which clean air is supplied in a down flow from a ceiling or an upper section in the vicinity of the ceiling, at least three floors or more of the working floors are secured in response to cleanliness required for works conducted on each working floor.


Inventors:
ODA MICHIAKI
NAKAGAWA KAZUYA
MATSUSHIMA HIDEAKI
SEKI HIDETOSHI
HAYASHI TOSHIRO
Application Number:
JP2000333507A
Publication Date:
May 17, 2002
Filing Date:
October 31, 2000
Export Citation:
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Assignee:
SHINETSU HANDOTAI KK
International Classes:
E04H5/02; F24F3/16; F24F7/06; E04B5/43; H01L21/00; H01L21/677; (IPC1-7): E04B5/43; E04H5/02; F24F7/06
Domestic Patent References:
JPH10310491A1998-11-24
JPH05205988A1993-08-13
JPH09221381A1997-08-26
JPH06159751A1994-06-07
JP2002048370A2002-02-15
JPH04310592A1992-11-02
JPH1191937A1999-04-06
JPH11322493A1999-11-24
Foreign References:
US5641354A1997-06-24
Attorney, Agent or Firm:
Mikio Yoshimiya