To provide a drawing-up room in which dusting works, such as overhaul and cleaning of a furnace body and components in the furnace body and works or the like requiring high clean environment, such as the stock of a raw material into the furnace body as drawing-up machine startup preparation can be separated while the safety of works can be ensured even when the drawing-up machines are enlarged in the drawing-up room, in which a plurality of the single-crystal drawing-up machines are installed.
In the cleaned drawing-up room, in which the plurality of the single-crystal drawing-up machines are mounted, which has a plurality of working floors and in which clean air is supplied in a down flow from a ceiling or an upper section in the vicinity of the ceiling, at least three floors or more of the working floors are secured in response to cleanliness required for works conducted on each working floor.
WO/2012/160420 | METHOD AND APPARATUS FOR MAKING STATIONERY PARABOLIC SOLAR COLLECTOR |
JPS54117136 | POWER PLANT ON THE SEA |
NAKAGAWA KAZUYA
MATSUSHIMA HIDEAKI
SEKI HIDETOSHI
HAYASHI TOSHIRO
JPH10310491A | 1998-11-24 | |||
JPH05205988A | 1993-08-13 | |||
JPH09221381A | 1997-08-26 | |||
JPH06159751A | 1994-06-07 | |||
JP2002048370A | 2002-02-15 | |||
JPH04310592A | 1992-11-02 | |||
JPH1191937A | 1999-04-06 | |||
JPH11322493A | 1999-11-24 |
US5641354A | 1997-06-24 |