Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
DRESSER
Document Type and Number:
Japanese Patent JPH09300208
Kind Code:
A
Abstract:

To provide a dresser capable of dressing an abrasive cloth, even when it is a hard one, properly and efficiently.

In a dresser 3 for dressing an abrasive cloth 2, a dressing part 5 touching with the abrasive cloth 2 of the dresser 3 is made of carbon fibers and the carbon fiber is of honeycomb construction. By pushing a hard carbon fiber against the abrasive cloth 2, efficient dressing can be conducted to a hard abrasive cloth 2 like a urethane foam. Moreover, since there is no falling- off of a diamond as happens in a diamond-utilized dresser 3, the surface of an article to be polished like a semiconductor wafer can be polished without impairing it, thereby enhancing the yield on the article to be polished.


Inventors:
ITANI NAOKI
Application Number:
JP14108396A
Publication Date:
November 25, 1997
Filing Date:
May 10, 1996
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
NIPPON STEEL CORP
International Classes:
B24B53/017; H01L21/304; (IPC1-7): B24B37/00; H01L21/304
Attorney, Agent or Firm:
國分 孝悦