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Patent Searching and Data


Title:
DRESSING DEVICE AND POLISHING DEVICE
Document Type and Number:
Japanese Patent JP2002154048
Kind Code:
A
Abstract:

To provide a dressing device capable of efficiently reproducing a polishing surface, by surely and easily planarizing the polishing surface, even if the polishing surface on a polishing table has irregularity.

This dressing device 50 for dressing the polishing surface 35a on the polish table 35 for polishing an object W to be polished by sliding on the object W to be polished. This dressing device 50 has a dresser 51 formed in an elongated rectangle for dressing the polishing surface 35a. The dressing surface 51a of the dresser 51 is formed into a plane surface 51a-1 in contact with the polishing surface 35a, and taper surfaces 51a-2, 51a-3 inclined in a direction separating apart from the polishing surface 35a from the plane surface 51a-1 or the curved surfaces extending in a direction separating apart from the polishing surface 35a from the plane surface 51a-1.


Inventors:
TOGAWA TETSUJI
NABEYA OSAMU
Application Number:
JP2000350820A
Publication Date:
May 28, 2002
Filing Date:
November 17, 2000
Export Citation:
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Assignee:
EBARA CORP
International Classes:
B24B53/017; B24B53/02; B24B53/12; B24B55/06; B24D7/02; H01L21/304; (IPC1-7): B24B37/00; B24B53/02; B24B53/12; B24B55/06; H01L21/304
Attorney, Agent or Firm:
Isamu Watanabe (1 person outside)