Title:
DRESSING DEVICE
Document Type and Number:
Japanese Patent JP2023164098
Kind Code:
A
Abstract:
To provide a dressing device configured so that flatness of a polishing pad can be improved and cut amounts of the polishing pad can be made uniform during dressing.SOLUTION: A dressing device 1 is provided with a dresser 3 that performs dressing of a polishing pad 11a mounted on an upper surface plate 11 in an annular shape that polishes a work-piece, while moving along a trajectory 2c in a circular arc shape crossing an outer peripheral edge 14 and an inner peripheral edge 15 of the upper surface plate 11. The dresser 3 has a dressing region 33 which contacts the polishing pad 11a. Contact lengths S1 and S2 along a circumferential direction α of a surface plate between the dressing region 33 and the polishing pad 11a gradually become smaller as going from outside toward inside in a radial direction β of the surface plate, when the dresser 3 is positioned at the outer peripheral edge 14 of the upper surface plate 11, and gradually become smaller as going from the inside toward the outside in the radial direction β of the surface plate, when the dresser 3 is positioned at the inner peripheral edge 15 of the upper surface plate 11.SELECTED DRAWING: Figure 8
Inventors:
INOUE YUSUKE
ODAGIRI SHIGERU
TAYAMA YU
TAKEI YUKI
ODAGIRI SHIGERU
TAYAMA YU
TAKEI YUKI
Application Number:
JP2022075432A
Publication Date:
November 10, 2023
Filing Date:
April 28, 2022
Export Citation:
Assignee:
SPEEDFAM CO LTD
International Classes:
B24B53/017; B24B53/12; H01L21/304
Attorney, Agent or Firm:
Cleo International Law & Patent Office