Title:
ドレッシング装置、化学的機械的研磨装置及び方法
Document Type and Number:
Japanese Patent JP5236515
Kind Code:
B2
Abstract:
An apparatus dresses a polishing pad. The apparatus includes a dresser drive shaft which is rotatable and vertically movable, a dresser flange coupled to the dresser drive shaft and configured to secure a dressing member thereto, a spherical bearing provided in the dresser flange and configured to allow the dressing member to tilt with respect to the dresser drive shaft, and a spring mechanism configured to generate a force against a tilting motion of the dressing member.
Inventors:
Kazuhide Watanabe
Ryuichi Kosuga
Soichi Isobe
Ryuichi Kosuga
Soichi Isobe
Application Number:
JP2009016851A
Publication Date:
July 17, 2013
Filing Date:
January 28, 2009
Export Citation:
Assignee:
Ebara Corporation
International Classes:
B24B53/12; B24B37/00; B24B45/00; B24B53/00; B24B53/017; B24B53/02; B24D7/16; H01L21/304
Domestic Patent References:
| JP11333698A | ||||
| JP2000315665A | ||||
| JP2002210650A | ||||
| JP2002509811A |
Attorney, Agent or Firm:
Isamu Watanabe
Ryoji Kosugi
Tetsuya Hirosawa
Ryoji Kosugi
Tetsuya Hirosawa