Title:
DRIER FOR GLASS SUBSTRATE
Document Type and Number:
Japanese Patent JP3242484
Kind Code:
B2
Abstract:
PURPOSE: To obtain a glass substrate dried under a clean state by removing dust generated from the seal section of a shaft.
CONSTITUTION: A rotating disc 5 rotating a glass substrate while the glass substrate 4 is placed, a shaft 3 rotatably supporting the rotating disc 5 to a base 1 and an infection nozzle 6 infecting a gas near the center of revolution of the rear of the glass substrate are provided. The flow path 7 of a gas communicating the infection nozzle is formed to the shaft, and an opening section 7a, in which the base end of the flow path is opened on the side face of the shaft is formed while an oil seal 9 is set up to the connecting section of the flow path and the opening section. The infection nozzle is supplied with the gas through the opening section from the supply source of the gas. A filtration means 16 is fitted to the flow path 7 of the gas reaching the injection nozzle 6 from the opening section 7a of the shaft. A vacuum hole 14 is formed near the oil seal 9, and exhaust is conducted from the vacuum hole.
More Like This:
Inventors:
Masakazu Nagashima
Yoshiaki Kurokawa
Hisaaki Miyasako
Akira Hara
Yoshiaki Kurokawa
Hisaaki Miyasako
Akira Hara
Application Number:
JP7013993A
Publication Date:
December 25, 2001
Filing Date:
March 29, 1993
Export Citation:
Assignee:
Shibaura Mechatronics Co., Ltd.
International Classes:
B05C9/10; C03C23/00; F26B5/08; G02F1/13; G03F1/82; G09F9/00; H01L21/304; (IPC1-7): H01L21/304; F26B5/08; G02F1/13
Domestic Patent References:
| JP61117246U |
Attorney, Agent or Firm:
Takahisa Sato
Previous Patent: 6-can pack packaging and cardboard gift boxes with pictures printed on the back
Next Patent: METHOD AND DEVICE FOR EXCAVATING SHAFT
Next Patent: METHOD AND DEVICE FOR EXCAVATING SHAFT