To provide a drier in which compressed air is blown to a substrate carried almost in the horizontal direction by a carrier roll to remove a treating liquid so as to remove the treating liquid without blowing off the liquid.
The drier is constituted by being equipped with a carrying means having a carrying passage R to carry a substrate W having liquid films or liquid droplets of the treating liquid 50 on the surfaces Wa, Wb in one direction, a blowing means 10 to blow drying air onto the surfaces Wa, Wb of the substrate W to move the liquid 50 to the upstream side of the carrying direction, and a liquid receiving means 11 which is disposed in contact or near the passage side r1 of the carrying passage R in the upstream side than the blowing means 10 and which receives the liquid 50 on the substrate surfaces Wa, Wb.
MIMORI KENICHI
ITO TAKUO
Tadashi Takahashi
Takashi Watanabe
Masakazu Aoyama
Suzuki Mitsuyoshi
Kazuya Nishi
Yasuhiko Murayama