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Patent Searching and Data


Title:
DRIVE DEVICE AND EXPOSURE DEVICE
Document Type and Number:
Japanese Patent JP2005273844
Kind Code:
A
Abstract:

To provide a drive device with the through-put free of lowering and embodied in a less large construction.

A supporting mechanism to transmit the power of a motor 103 as a drive source to a mechanism part 106 as a member to be driven through a rotary shaft 10 and support the rotary shaft 10 is equipped with a functional fluid with the viscosity variable and a viscosity controlling means to control the viscosity of the functional fluid. The viscosity controlling means controls when the motor 103 is in operation so that the viscosity of the functional fluid lowers, and when the motor 103 is at a standstill, controls so that the viscosity of the functional fluid heightens.


Inventors:
INOUE TAKASHI
Application Number:
JP2004090989A
Publication Date:
October 06, 2005
Filing Date:
March 26, 2004
Export Citation:
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Assignee:
CANON KK
International Classes:
F16D63/00; H01L21/027; (IPC1-7): F16D63/00; H01L21/027
Domestic Patent References:
JPH0618737U1994-03-11
JP2003294156A2003-10-15
JPS61165072A1986-07-25
JPS55163342A1980-12-19
JP2000055089A2000-02-22
JP2002130342A2002-05-09
JPS6255743U1987-04-07
JPH11288867A1999-10-19
Attorney, Agent or Firm:
Tetsuya Ito