Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
DRIVING DEVICE FOR DOUBLE-SIDE POLISHING DEVICE
Document Type and Number:
Japanese Patent JP2001162525
Kind Code:
A
Abstract:

To provide a driving device for a double-side polishing device capable of driving all rotating members in the double-side polishing device by one small- sized driving device, and to provide the double-side polishing device.

This driving device for a double-side polishing device is composed of four driving motors 8-1 to 8-4, and a transmission 1. The transmission 1 has an upper surface plate shifting portion 2, a sun gear shifting portion 3, a lower surface plate shifting portion 4, and an internal gear shifting portion 5. Worm wheel gears 22, 32, 42, 52 of output shafts 20, 30, 40, 50 concentrically assembled are engaged with worm wheel gears 27, 37, 47, 57 of input shafts 25, 35, 45, 55 assembled in parallel, thereby composing the upper surface plate shifting portion 2, the sun gear shifting portion 3, the lower surface plate shifting portion 4, and the internal gear shifting portion 5. Driving force of the driving motors 8-1 to 8-4 is respectively transmitted to the input shafts 25, 35, 45, 55 through power transmitting members 6-1 to 6-4, thereby respectively rotating the output shafts 20, 30, 40, 50.


Inventors:
FURUSAWA SHIRO
SADOHARA TAKESHI
Application Number:
JP35081599A
Publication Date:
June 19, 2001
Filing Date:
December 09, 1999
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
SPEEDFAM CO LTD
International Classes:
B24B37/08; H01L21/304; (IPC1-7): B24B37/04; H01L21/304
Attorney, Agent or Firm:
Takakazu Tsukahara