PURPOSE: To perform time division driving of bearing type turbo molecular pumps by means of one driving part by sequentially switching the bearing type turbo molecular pumps to be driven in each time set according to a usable condition of the molecular pumps, and supplying power to the pumps from the driving part.

CONSTITUTION: TMPs 5a to 5c as bearing type turbo molecular pumps are connected to a TMP controller 7 each through a wiring switcher 6. Operation of the wiring switcher 6 is controlled by an external sequence controller 9. The TMPs 5a to 5c to be controlled are sequentially switched. One of them is selected and connected to the TMP controller 7. According the set order, the TMPs 5a to 5c to be driven are sequentially switched in every specified time, while time division driving of the TMPs 5a to 5c due to one TMP controller 7 is attained. It is thus possible to save a space and reduce power consumption.