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Title:
DROPLET DISCHARGE APPARATUS
Document Type and Number:
Japanese Patent JP2007167741
Kind Code:
A
Abstract:

To provide a method of forming a pattern and a droplet discharge apparatus in which the fine pattern comprising droplets is easily formed by miniaturizing a discharge port for discharging the droplets.

A transmitting plate 27 and a light shielding plate 29 are arranged above a cavity 24 and an irradiation hole 29h for irradiating the inside of the cavity 24 with a laser beam is formed to penetrate on a position of the light shielding plate 29 opposed to each nozzle N. A semiconductor laser 19A emitting a laser beam to make a metallic ink F fluid is arranged above the light shielding plate 29 and an optical modulator 19C provided with a mirror element 19D corresponding to each irradiation hole 29h is arranged between each irradiation hole 29h and the semiconductor laser 19A. Each mirror element 19D is displaced between an irradiation position and a non-irradiation position to modulate the travelling direction of the laser beam from the semiconductor laser 19A to the correspondent cavity 24.


Inventors:
SUKAI KEIGO
Application Number:
JP2005367070A
Publication Date:
July 05, 2007
Filing Date:
December 20, 2005
Export Citation:
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Assignee:
SEIKO EPSON CORP
International Classes:
B05C5/00
Domestic Patent References:
JP2001353875A2001-12-25
JP2005518965A2005-06-30
JPH02150357A1990-06-08
JPS6179715A1986-04-23
JPS60158993A1985-08-20
JP2005118847A2005-05-12
JP2003132670A2003-05-09
JP2005074479A2005-03-24
Attorney, Agent or Firm:
Hironobu Onda
Makoto Onda



 
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