Title:
液滴吐出装置、液状体の吐出方法、カラーフィルタの製造方法、有機EL装置の製造方法
Document Type and Number:
Japanese Patent JP5115281
Kind Code:
B2
Abstract:
A liquid droplet discharging apparatus includes a substrate having a plurality of film formation regions; a plurality of nozzles discharging droplets of a liquid, the nozzles being positioned facing the substrate and moved relatively with respect to the substrate to perform a scanning operation so as to discharge the droplets in the film formation regions during the scanning operation; a first moving mechanism moving the substrate relatively with the nozzles in a first direction; a plurality of driving units provided, each corresponding to one of the nozzles; a nozzle driving section generating a plurality of driving signals to supply one of the driving signals changing amounts of the droplets to be discharged to the driving units so as to allow the droplets to be discharged from the nozzles; and a control section controlling the first moving mechanism to allow the scanning operation to be performed a plurality of times over a same film formation region and controlling the nozzle driving section to allow a predetermined amount of the liquid to be discharged as droplets in the same film formation region during the plurality of times of the scanning operations and to change the driving signal applied to the driving units corresponding to nozzles positioned over the film formation region among the nozzles in each of the scanning operations.
Inventors:
Toru Shinohara
Application Number:
JP2008094724A
Publication Date:
January 09, 2013
Filing Date:
April 01, 2008
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
H05B33/10; B05C5/00; B05D1/26; B05D7/00; G02B5/20; G09F9/00; H01L51/50
Domestic Patent References:
| JP2003320291A | ||||
| JP2004090621A | ||||
| JP2005021862A | ||||
| JP2005047208A | ||||
| JP2005093099A |
Attorney, Agent or Firm:
Masahiko Ueyanagi
Osamu Suzawa
Kazuhiko Miyasaka
Osamu Suzawa
Kazuhiko Miyasaka