Title:
液滴噴射装置の製造プロセス
Document Type and Number:
Japanese Patent JP6979018
Kind Code:
B2
Abstract:
A process of manufacturing droplet jetting devices includes bonding together a nozzle wafer defining nozzles of the jetting devices, a membrane wafer carrying, on a membrane, actuators for generating pressure waves in a liquid in pressure chambers that are connected to the nozzles, and a distribution wafer forming a distribution layer that defines supply lines for supplying the liquid to the pressure chambers from a liquid reservoir formed on a side of the distribution layer opposite to the membrane wafer; and dicing the bonded wafers. The distribution layer has a thickness larger than the thickness of each of the other two wafers. A restrictor for controlling the inertance of the liquid supply line is formed through the distribution layer in a direction normal to the plane of that layer.
Inventors:
Rhine ten, hans
Van der Mer, Lane yachts.
Huygens, Michael A. Yacht.
Felsey, Klaas
Van der Mer, Lane yachts.
Huygens, Michael A. Yacht.
Felsey, Klaas
Application Number:
JP2018519020A
Publication Date:
December 08, 2021
Filing Date:
October 07, 2016
Export Citation:
Assignee:
Canon production printing netherland bee buoy
International Classes:
B41J2/16; B41J2/14
Domestic Patent References:
| JP2008296578A | ||||
| JP2009220310A | ||||
| JP2015128831A | ||||
| JP2009056691A | ||||
| JP2014520011A | ||||
| JP2013063590A |
Foreign References:
| US20130115724 |
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Shinsuke Onuki
Tadahiko Ito
Shinsuke Onuki