Title:
DROPLET JETTING APPARATUS AND METHOD OF MANUFACTURING COATED BODY
Document Type and Number:
Japanese Patent JP2007253043
Kind Code:
A
Abstract:
To provide a droplet jetting apparatus capable of preventing occurrence of production failure of a coated body due to burst of the surface film of droplets deposited on an object to be coated.
The droplet jetting apparatus comprises a coating part for jetting droplets to an object to be coated 2a for coating, a storage chamber 5a for storing the object 2a coated with droplets, a gas discharge part 5c for discharging the gas in the storage chamber 5a, an adjustment part 5d for adjusting the discharge flow rate of the gas to be discharged out of the storage chamber 5a by the gas discharge part 5c, and control means for controlling the adjustment part 5d for changing discharge flow rate step by step.
COPYRIGHT: (C)2008,JPO&INPIT
Inventors:
ISHIHARA HARUHIKO
KONASE ATSUSHI
KONASE ATSUSHI
Application Number:
JP2006079377A
Publication Date:
October 04, 2007
Filing Date:
March 22, 2006
Export Citation:
Assignee:
TOSHIBA CORP
International Classes:
B05C9/12; B05C5/00; B05D1/26; B05D3/12; H01L51/50; H05B33/10; G02B5/20
Attorney, Agent or Firm:
Hidekazu Miyoshi
Iwa Saki Kokuni
Kawamata Sumio
Nakamura Tomoyuki
Masakazu Ito
Shunichi Takahashi
Toshio Takamatsu
Iwa Saki Kokuni
Kawamata Sumio
Nakamura Tomoyuki
Masakazu Ito
Shunichi Takahashi
Toshio Takamatsu
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