Title:
DROPLET REMOVAL DEVICE
Document Type and Number:
Japanese Patent JP2016220757
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a droplet removal device that enables a state of the device to be grasped.SOLUTION: A droplet removal device 10 includes oscillators O1-O4 for generating vibration, receivers R1-R4 for receiving the vibration, a driving circuit 11 for driving the oscillators O1-O4, and a control circuit 12 for controlling the driving circuit 11 so as to drive the oscillators O1-O4 with the vibration of a first amplitude or drive them with the vibration of a second amplitude. If the amplitude becomes equal to or smaller than a predetermined droplet adhesion reference value when the vibration is received by the receivers R1-R4, the control circuit 12 determines that a droplet adheres to a surface of a detection object, and determines a failure of the receivers R1-R4.SELECTED DRAWING: Figure 6
Inventors:
HIKITA KEIGO
BANNO YOSHIHISA
BANNO YOSHIHISA
Application Number:
JP2015107882A
Publication Date:
December 28, 2016
Filing Date:
May 27, 2015
Export Citation:
Assignee:
ASMO CO LTD
International Classes:
A47L1/00
Attorney, Agent or Firm:
Makoto Onda
Hironobu Onda
Hironobu Onda