Title:
モリブデン系金属膜上の絶縁膜のドライエッチング方法および薄膜トランジスタパネルの製造方法
Document Type and Number:
Japanese Patent JP5299245
Kind Code:
B2
Inventors:
Yoshitaka Tanaka
Application Number:
JP2009275284A
Publication Date:
September 25, 2013
Filing Date:
December 03, 2009
Export Citation:
Assignee:
CASIO COMPUTER CO.,LTD.
International Classes:
H01L21/3065; H01L21/336; H01L21/768; H01L29/786
Domestic Patent References:
| JP59033833A | ||||
| JP2001127303A | ||||
| JP2007149852A |
Attorney, Agent or Firm:
Hidemi Kashima
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