Title:
ドライエッチング方法
Document Type and Number:
Japanese Patent JP5958600
Kind Code:
B2
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Inventors:
Hibino Yasuo
Tomonori Umezaki
Kikuchi Akio
Isamu Mouri
Satoru Okamoto
Tomonori Umezaki
Kikuchi Akio
Isamu Mouri
Satoru Okamoto
Application Number:
JP2015096141A
Publication Date:
August 02, 2016
Filing Date:
May 11, 2015
Export Citation:
Assignee:
Central Glass Co., Ltd.
International Classes:
H01L21/3065; C09K13/08; H05H1/46
Domestic Patent References:
| JP2009206444A | ||||
| JP2009206394A | ||||
| JP2008300616A | ||||
| JP2002530863A |
Foreign References:
| US6174451 | ||||
| WO2009041560A1 | ||||
| US20100264116 |
Attorney, Agent or Firm:
Makoto Koide