Title:
DRY ETCHING METHOD
Document Type and Number:
Japanese Patent JPS5470772
Kind Code:
A
Inventors:
MATSUO TAKESHI
KINOSHITA HIROSHI
KINOSHITA HIROSHI
Application Number:
JP13765677A
Publication Date:
June 06, 1979
Filing Date:
November 16, 1977
Export Citation:
Assignee:
CHO LSI GIJUTSU KENKYU KUMIAI
International Classes:
H01L21/302; G03F7/20; H01L21/027; H01L21/3065; (IPC1-7): H01L21/302