Title:
DRY TYPE CLEANING SYSTEM OF COLD TRAP
Document Type and Number:
Japanese Patent JPS5453799
Kind Code:
A
Abstract:
PURPOSE: To remove a solid impurity accumulated within UF6 cold trap by gas spray and floating.
CONSTITUTION: Cold trap 7 is exhausted until about 10-2-10-3 Torr after UF6 collected within cold trap 7 is liquid recovered. Purge type nitrogen gas is sprayed o n pulverized powder accumulated on the bottom with nozzle 13 to float the pulverized powder, afterward the floating impurity being sucked into dust trap by opening a valve located between dust trap 11
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Inventors:
KAWAMURA FUMIO
KOMORI ITARU
KOMORI ITARU
Application Number:
JP11992377A
Publication Date:
April 27, 1979
Filing Date:
October 07, 1977
Export Citation:
Assignee:
HITACHI LTD
International Classes:
B01D59/00; (IPC1-7): B01D59/00