Title:
ドライ真空ポンプ
Document Type and Number:
Japanese Patent JP4017365
Kind Code:
B2
Inventors:
Yoshinori Kojima
Kiyoshi Yanagisawa
Kiyoshi Yanagisawa
Application Number:
JP2001220249A
Publication Date:
December 05, 2007
Filing Date:
July 19, 2001
Export Citation:
Assignee:
Ebara Corporation
International Classes:
F04C18/18; F04C25/02; F04C18/08; F04C18/12; F04C29/00; F04C29/04
Domestic Patent References:
| JP8319967A | ||||
| JP6249173A | ||||
| JP10318168A | ||||
| JP5149287A | ||||
| JP62279293A | ||||
| JP2002364571A |
Attorney, Agent or Firm:
Isamu Watanabe
Shintaro Hotta
Ryoji Kosugi
Tomohiro Mori
Shintaro Hotta
Ryoji Kosugi
Tomohiro Mori