Title:
DRY VACUUM PUMP
Document Type and Number:
Japanese Patent JPH05118296
Kind Code:
A
Abstract:
PURPOSE: To prevent stick and deposit of reaction product to a pump passage without solidification of gas even if the gas of high sublimation temperature is sucked into the pump passage.
CONSTITUTION: A dry vacuum pump is constructed so that a cooling jacket is provided on an outer peripheral part of a stator 5, and refrigerant is supplied into the cooling jacket for cooling the stator 5. Some means such as low ribs 10 are provided in the cooling jacket for producing stagnation in the flow of refrigerant and for reducing cooling efficiency and controlling the temperature of the stator 5 so that the easy-to-condense gas does not condense.
Inventors:
NAGAOKA TAKASHI
UEDA SHINJIRO
SAKAGAMI SEIJI
UEDA SHINJIRO
SAKAGAMI SEIJI
Application Number:
JP27963891A
Publication Date:
May 14, 1993
Filing Date:
October 25, 1991
Export Citation:
Assignee:
HITACHI LTD
International Classes:
F04D19/04; F04D23/00; (IPC1-7): F04D19/04; F04D23/00
Attorney, Agent or Firm:
Masami Akimoto