PURPOSE: To dry in a short time by rotating material to be dried on a turntable disposed in a drying chamber, pressure reducing and heating it.

CONSTITUTION: When material 2 to be dried which is transported by a robot in the state that the opening 1A of a chamber 1 is opened is filled in a vessel and placed on a turntable 3, the CPU of a dryer control circuit 9 detects it, and closes an upper cover or a door 5 to a sealed state. A vacuum pump 18 or an ejector is operated, cleaning agent adhered into the material 2 is recovered via a solvent recovering unit 10, and the chamber 1 is pressure-reduced to about 1Torr at the maximum. Further, heating means 4 is operated, a drive motor 6 is rotated, the turntable 3 is rotated to the necessary maximum limit to scatter water or cleaning agent such as hydrocarbon adhered to the material 2 by a centrifugal force and to heat it, and simultaneously pressure reduced. Accordingly, a required drying time can be largely shorted.