Title:
DRYER WITH EXHAUST DUCT THEREIN
Document Type and Number:
Japanese Patent JP3907902
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a dryer for drying substrates coated with material containing organic solvent capable of preventing dew condensation of gas containing organic solvent volatilized from the material containing organic solvent, corrosion of dryer body, duct and the like caused by dew condensation and pollution of the substrate.
SOLUTION: The dryer is used for drying the substrate 1 coated with material containing organic solvent. An exhaust duct 27 is arranged inside the dryer for exhausting gas containing the organic solvent volatilized from the material.
Inventors:
Okamoto Sonji
Application Number:
JP2000016116A
Publication Date:
April 18, 2007
Filing Date:
January 25, 2000
Export Citation:
Assignee:
Nippon Insulator Co., Ltd.
International Classes:
F26B15/12; F27B9/02; F27B9/30; F27D17/00; (IPC1-7): F26B15/12; F27B9/02; F27B9/30; F27D17/00
Domestic Patent References:
| JP10082583A | ||||
| JP8296962A | ||||
| JP11128807A |
Attorney, Agent or Firm:
Ippei Watanabe
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