Title:
DRYER
Document Type and Number:
Japanese Patent JP2005072442
Kind Code:
A
Abstract:
To provide a dryer capable of drying objects to be dried within a short time in an energy saving state, simplifying maintenance, and preventing the object to be dried from being contaminated again.
The dryer comprises a processing tank having a hollow inside, carrying rollers arranged so as to be penetrated into the center part of the processing tank, and capable of continuously carrying objects to be dried from the entrance of the processing tank to the exit; halogen lamp heaters arranged on the upper part of the carrying rollers; and a radiation board arranged on the lower part of the carrying rollers.
Inventors:
HONDA SATORU
HATAKE KAZUO
HAGIWARA TAKEHIRO
SUGIMOTO SHINGO
HORIIKE HIDEO
HATAKE KAZUO
HAGIWARA TAKEHIRO
SUGIMOTO SHINGO
HORIIKE HIDEO
Application Number:
JP2003302658A
Publication Date:
March 17, 2005
Filing Date:
August 27, 2003
Export Citation:
Assignee:
SHIMADA PHYSICAL CHEM IND CO
International Classes:
F26B3/30; F26B9/06; F26B15/12; H01L21/304; (IPC1-7): H01L21/304; F26B3/30; F26B9/06; F26B15/12
Attorney, Agent or Firm:
Junichi Ueshima
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