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Title:
DRYER
Document Type and Number:
Japanese Patent JP2018179479
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To accurately obtain an intended pattern i.e., a minute wiring pattern without irregular edges formed on the surface of a substrate of an object to be dried by making it possible to carry out a rapid heat cycle of heating and cooling the object to be dried.SOLUTION: There is provided a dryer comprising a base, a heat source disposed above the base, and a coolant pipe for a coolant to flow therethrough disposed above the heat source and/or on the side face thereof to cool the heat source, with an interval between the center of the heat source and that of the coolant pipe being set between 25 and 35 mm.SELECTED DRAWING: Figure 3

Inventors:
SUZUKI AKIRA
Application Number:
JP2017086638A
Publication Date:
November 15, 2018
Filing Date:
April 07, 2017
Export Citation:
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Assignee:
SUZUKI AKIRA
International Classes:
F26B23/04



 
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