To solve the problem that in a continuous furnace continuously transferring substrates in a substrate drying furnace, substrate transfer means, such as a transfer roll, a chain belt, and a walking beam, cause the temperature irregularity of the substrates due to a contact surface between the substrate transfer means and the substrates, and besides dust arises from the transfer means or a large-sized substrate warps.
A transfer means 30 includes a bearing unit 32 on which a substrate 5 is placed to be movable in a transfer direction, and a moving means 34 which moves the substrate 5 in the transfer direction on the bearing unit 32. The bearing unit 32 has a number of spheres 21 arranged to be capable of free revolution on a flat horizontal surface. The moving means 34 is provided as a pair of transfer rollers 2d which are so set as to direct their axes in the vertical direction and cause their end faces to hold the substrate 5 from both sides of a substrate transfer path.
MATSUZAWA HIROSHI
YOKOI HAJIME
JPH1111620A | 1999-01-19 | |||
JP2007317724A | 2007-12-06 | |||
JP2009046280A | 2009-03-05 | |||
JP2005354041A | 2005-12-22 | |||
JP2004273125A | 2004-09-30 |
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