Title:
HEATING DRYER
Document Type and Number:
Japanese Patent JP2016205717
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a heating dryer capable of preventing sublimate adhering to the inner wall of a chamber from being mixed into a coating film, and also suppressing the frequency of cleaning work of the chamber.SOLUTION: A heating dryer includes a chamber storing a substrate, a heater configured to a coating film formed on a substrate, and an exhaust unit configured to exhaust the chamber; and while exhaust the chamber, heats the coating film on the substrate installed in the chamber to dry the film. On an opposite wall opposite to the installed substrate, a porous part forming an air layer on the surface of the wall is provided in a region opposite to at least the whole surface of the substrate.SELECTED DRAWING: Figure 1
Inventors:
HAMAKAWA KENJI
OKUDA DAISUKE
OKAMOTO KANJI
OKUDA DAISUKE
OKAMOTO KANJI
Application Number:
JP2015088502A
Publication Date:
December 08, 2016
Filing Date:
April 23, 2015
Export Citation:
Assignee:
TORAY ENG CO LTD
International Classes:
F26B3/20; F26B9/00; F26B21/00