DRYING DEVICE - SHINKO ELECTRIC IND CO

Title:

DRYING DEVICE

Document Type and Number:

Japanese Patent JP2010157586

Kind Code:

A

Abstract:

To provide a drying device that is miniaturizable.

The drying device includes: a transferring means 22 to which a substrate holding station 12, a substrate transferring station 14, and a heating furnace 16 are linearly arranged carrying in and out a substrate holder 20 which clamps to hold a substrate 21 to and from the heating furnace 16; a cooling device 60 arranged over the transferring station 14; a transfer device 64 receiving the substrate 21 discharged from the inside of the heating furnace 16 to the transferring station 14 from the substrate holder 20, and transferring it to the cooling device 60; and a discharging table 80 transferring the substrate 21 cooled by the cooling device 60 and transferred by the transfer device 64 under the cooling device 60 to the lateral discharging position.

Inventors:

OKADA KENJI
HIRABAYASHI MASAFUMI
YAMAZAKI SHUJI

Application Number:

JP2008334532A

Publication Date:

July 15, 2010

Filing Date:

December 26, 2008

Export Citation:

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Assignee:

SHINKO ELECTRIC IND CO

International Classes:

H05K3/28; F26B3/04; F26B9/06; H01L21/027

Domestic Patent References:

JP2001110793A	2001-04-20
JP2003289093A	2003-10-10
JP2004235468A	2004-08-19
JP2000058438A	2000-02-25
JP2001110793A	2001-04-20
JP2003289093A	2003-10-10
JP2004235468A	2004-08-19
JP2000058438A	2000-02-25

Attorney, Agent or Firm:

Takao Watanuki
Horimai Kazuharu

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