Title:
DRYING DEVICE
Document Type and Number:
Japanese Patent JP3926923
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To hang a thin sheet-shaped work for appropriately carrying inside a drying room, minimizing dust generation in the upper part of the work for appropriate drying, and utilizing efficiently for miniaturization and the like of a device.
SOLUTION: A drying device comprises a substrate supplying device 18 for holding a substrate 10 on a hanger 14 and sending the substrate to a drying room 12, a loading part 24 arranged in the drying room 12 wherein a plurality of hangers 14 are loaded in a row, a feeding device 22 provided with a feeding action part 26 for loading a plurality of hanger 14, moving upward, moving horizontally into the feeding direction, moving downward, and moving horizontally into a direction opposite to the feeding direction in that order, the hangers 14 and the substrate 10 sent into the drying room 12 by the feeding device 22 are separated, a substrate discharging device 30 for discharging the substrate 10, and a returning device 32 for returning the hangers 14 to the substrate supplying device 18.
Inventors:
Youji Sato
Application Number:
JP9753698A
Publication Date:
June 06, 2007
Filing Date:
April 09, 1998
Export Citation:
Assignee:
Max Tech Co., Ltd.
International Classes:
B65G47/61; F26B15/00; B65G49/00; F27B9/20; F27B9/24; H01L21/304; H01L21/677; H01L21/68; (IPC1-7): F26B15/00; B65G49/00; F27B9/20; F27B9/24; H01L21/304; H01L21/68; //B65G47/61
Domestic Patent References:
| JP6006014A | ||||
| JP9290906A | ||||
| JP55107880A |
Attorney, Agent or Firm:
Takao Watanuki
Horimai Kazuharu
Horimai Kazuharu