乾燥装置、乾燥方法、有機エレクトロルミネッセンス装置の製造方法、カラーフィルタの製造方法

Title:

乾燥装置、乾燥方法、有機エレクトロルミネッセンス装置の製造方法、カラーフィルタの製造方法

Document Type and Number:

Japanese Patent JP4806898

Kind Code:

B2

Abstract:

To provide a dryer in which uniform drying in a panel surface can be realized and thin film with uniform film thickness can be formed, even if the size of a substrate is large and throughput improvement can be attained, and to provide a drying method and a method for manufacturing an organic electroluminescence device which utilizes the drying method, a method of manufacturing a color filter, the organic electroluminescence device manufactured by the method, and a liquid crystal device.

The dryer 1a for drying a target 3 to be dried, which is mounted on a substrate 2, is provided with a drying means 4 arranged opposite to the substrate 2. The distance between the substrate 2 and the drying means 3 in the facing direction is set to be continuously different, between a 1st part 2c and a 2nd part 2s in the plane direction on the substrate 3.

Inventors:

Shunichi Seki
Hideyuki Kimura

Application Number:

JP2004092004A

Publication Date:

November 02, 2011

Filing Date:

March 26, 2004

Export Citation:

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