Title:
DRYING METHOD AND DRYER
Document Type and Number:
Japanese Patent JP2019060505
Kind Code:
A
Abstract:
To efficiently dry a thin film formed on a substrate while containing an active substance, a solvent, and a binder, while preventing the binder present in the thin film from melting.SOLUTION: The drying method comprises an irradiation process of irradiating a thin film formed on a substrate while containing an active substance, a solvent, and a binder with far infrared light having a wavelength region, at which the infrared absorption rate of the solvent present in the thin film becomes maximum, and a cooling process of cooling the thin film to a temperature lower than the melting temperature of the binder in parallel with the irradiation process. Therefore, the binder present in the thin film can efficiently be dried while preventing the binder from melting.SELECTED DRAWING: Figure 6
Inventors:
RIKUI HIDEAKI
Application Number:
JP2017183171A
Publication Date:
April 18, 2019
Filing Date:
September 25, 2017
Export Citation:
Assignee:
SCREEN HOLDINGS CO LTD
International Classes:
F26B13/04; F26B3/30
Attorney, Agent or Firm:
Yoshitake Hidetoshi
Takahiro Arita
Takahiro Arita