DRYING TREATMENT DEVICE - SHIBAURA MECHATRONICS CORP

Title:

DRYING TREATMENT DEVICE

Document Type and Number:

Japanese Patent JP2000230783

Kind Code:

A

Abstract:

To discharge a gas blown off from an air-knife so that the gas is not blown up in a treatment tank.

The device blows off gas against base materials to dry them. The device comprises a treatment tank 1 wherein a feed port is formed on one end thereof while a delivery port is formed on the other end thereof, a transfer roller 7 which is provided in the tank 1 to transfer objects to be treated fed from the feed port toward the delivery port, air-knives 23, 24 which are disposed in the tank 1 to blow off gas against base materials being transferred by the roller 7 in a direction nearly in opposition to the transfer direction of the materials, and a gas discharge pipe 5b which is provided at the bottom of the tank 1 on the upstream side in the transfer direction of the materials to discharge the gas blown off from the knives 23, 24.

Inventors:

NISHIBE YUKINOBU
ISO AKINORI
KANEKO KATSUNORI
YAMAZAKI TAKAHIRO

Application Number:

JP3117099A

Publication Date:

August 22, 2000

Filing Date:

February 09, 1999

Export Citation:

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Assignee:

SHIBAURA MECHATRONICS CORP

International Classes:

H01L21/304; F26B15/12; (IPC1-7): F26B15/12; H01L21/304

Attorney, Agent or Firm:

Takehiko Suzue (6 outside)

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