PURPOSE: To provide a drying treatment device with which the vapor in a vapor treatment section intruding into a drying treatment section and leaking out to outside can be prevented, a throughput can be improved by cutting down the time of drying treatment, and safety can also be improved.
CONSTITUTION: A slit-like exhaust port 30 is provided on both sides of the side wall of a case 20 located on the lower part of a drying treatment part 29, and an exhaust pipe 31 is connected to the exhaust port 30. Also, a gas feeding port 32 is provided on a shutter 28, and a gas feeding pipe 33 and a dust-removing filter 34 are provided on the upper part of the above-mentioned gas feeding port 32. The gas such as nitrogen gas, for example, fed from the gas feeding pipe 33 is cleaned by the dust-removing filter 34, and the gas is fed into the drying treatment part 29 from the gas feeding port 32.
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